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Papers by Masashi Sato

Showing 21–6 of 6 results

  1. CMS-2010-025 CMSC 2010 Members

    System Improvements Based on the Operating Experiences of an Automatic 3D Measurement System

    Masashi Sato, Ghassan Chamsine

    Hitachi Engineering & Services Co., Ltd. · Nikon Metrology, Inc.