Aerospace Papers

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Technology All technologies 3D Scanning Aerospace Astronomy & Big Science Automotive Laser Radar Laser Tracker Photogrammetry Robotics Science Facilities Shipbuilding & Naval Standards & Calibration

Organization All organizations 3D Infotech, Inc. 3DIMPact Group, University College London (UCL) 8 Tree LLC A&M Precision Measuring Services, Inc. Academy of Opto-Electronics, Chinese Academy of Sciences Accurex Dimensional Measurement Systems Accurex Measurement, Inc. Aerospace Inspection Solutions AGT Robotics AICON 3D Systems GmbH Airbus Airbus Operations SAS Airbus UK Airbus, Filton, Bristol API Services Applied Automation Technologies, Inc. Applied Research Laboratory, Pennsylvania State University Arc Second, Inc. AREVA AREVA NP Inc. Argonne National Laboratory ARIS Technology Arthrex, Calibration and Metrology Association of Universities for Research in Astronomy (AURA), National Solar Observatory, Daniel K. Inouye Solar Telescope ASTM International ATT Metrology ATT Metrology Solutions AUDI AG Automated Precision Inc. (API) BAE Systems Bechtel Berding 3D Scanning BMW Group (Mini) BMW Manufacturing Co. Boeing Canada Boeing Research & Technology Boeing Technology Innovation Breuckmann GmbH Brookhaven National Laboratory Brown & Sharpe, Inc. Bruker Alicona Brunson Instrument Co. Brunson Instrument Company BUILDIT Software & Solutions Ltd. Bundeswehr University Munich C.R. Onsrud, Inc. CACT, Cerritos College California Manufacturing Technology Consulting (CMTC) Capture 3D, Inc. Capvidia Capvidia NA LLC Carl Zeiss Industrial Metrology Carl Zeiss X-ray Microscopy Center for Measurement Standards, Industrial Technology Research Institute Center for Precision Metrology China National Astronomical Observatories CogniTens 3D Vision Systems Ltd. College of Optical Sciences, University of Arizona Colorado School of Mines Confema GmbH Coordinate Metrology Society Coventry University, United Kingdom Cracow University of Technology, Laboratory of Coordinate Metrology Creaform inc. Creare LLC Dassault Systemes Data Point Metrology Delcam Dimensional Control Systems, Inc. Dimensional Metrology Standards Consortium (DMSC) Direct Dimensions, Inc. Duke Energy, Oconee Nuclear Station East Coast Metrology ECM ECM Global ECM Global (East Coast Metrology) ECM Global Measurement Solutions Electroimpact Electroimpact, Inc. EMF Corporation, Inc. Engineering Metrology Services Escola Politecnica da Universidade de Sao Paulo ESIC-SN Espace2001 S.A. FARO Technologies, Inc. Fermi National Accelerator Laboratory Fermi National Laboratory FFT Produktionssysteme FFT Produktionssysteme GmbH & Co. KG Flexure Engineering, LLC Ford Motor Company, Research and Vehicle Technology Fraunhofer Institute for Factory Operation and Automation IFF G2Metric Gancell Pty. Ltd. Gas Turbine Research Establishment (GTRE) GE Aerospace, CTH Metrology General Dynamics Bath Iron Works General Dynamics C4 Systems, VertexRSI Genesis Systems Géodésie Maintenance Services Geodesy Maintenance Services (GMS) Geodetic Institute (GIK), Karlsruhe Institute of Technology Geodetic Services, Inc. Geodetic Systems Inc. (GSI) Geomagic, Inc. HammerHead Logic Hardinge Inc. Harris Corporation, Government Communications System Division (GCSD), Melbourne, Florida Hexagon Manufacturing Intelligence Hexagon Metrology Hexagon Metrology, Inc. Hitachi Engineering & Services Co., Ltd. Hitachi Power Solutions Co., Ltd. Hydro Expertise Idaho Virtualization Lab, Idaho Museum of Natural History, Idaho State University IDEKO Research Centre IK4-TEKNIKER Illinois Institute of Technology Imetric SA Independent Industrial Technology Research Institute (ITRI), Center for Measurement Standards InnovMetric Software Inc. Inora Technologies, Inc. INSPHERE Ltd Institute of Applied Geosciences Institute of Measurement and Automatic Control, Leibniz Universität Hannover Institute of Microelectronics, Chinese Academy of Sciences IPS Technologies, Inc. (for Nextec) Janicki Industries JDP Metrology Consulting, LLC Johns Hopkins University Applied Physics Laboratory Kansas City National Security Campus Kansas State University Karlsruhe Institute of Technology (KIT) Karlsruhe Institute of Technology (KIT), Geodetic Institute Kennesaw State University, Department of Statistics and Analytical Sciences KIPAC, Stanford University KTH Royal Institute of Technology, School of Industrial Engineering and Management Lawrence Berkeley National Laboratory Lawrence Berkeley National Laboratory (LBNL) Lawrence Livermore National Laboratory (LLNL) Leibniz Universität Hannover Leica Geosystems Leonardo S.p.A. LM Wind Power (GE Vernova) Lockheed Martin Los Alamos National Laboratory Loughborough University Loyola University Maryland LSST Project, National Optical Astronomy Observatory (NOAO) LSST Telescope and Site Project Maglev, Inc. Mann+Hummel USA, Inc. Manufacturing Technology Centre (MTC) Manufacturing Validation Solutions LLC MetricVision, Inc. Metris UK Metris USA Metrologic USA Metrology 3+ Metrology 3Plus Metron Systems, Inc. metronom U.S., Inc. Metronor Metronor USA Inc. MetroSage LLC micronSpace Mission Research Corporation Mission Support Inc. MIT Lincoln Laboratory MTL Precision Multi Metrics, Inc. NASA Goddard Space Flight Center NASA Johnson Space Center, Image Science and Analysis Group National Astronomy and Ionosphere Center, Cornell University National Composites Centre National Ignition Facility, Lawrence Livermore National Laboratory National Institute of Standards and Technology National Institute of Standards and Technology (NIST) National Physical Laboratory (NPL) National Physical Laboratory, United Kingdom National Research Council Canada National Solar Observatory National Solar Observatory / DKIST National University of Technology (Argentina) National University of Technology, Mendoza, Argentina Naval Sea Systems Command Naval Surface Warfare Center Neomek Inc. Neomek Incorporated New River Kinematics Newport News Shipbuilding Nikon Metrology, Inc. NIST nms international AG, St. Gallen, Switzerland (NMS s.r.o., Bratislava) Northern Illinois University Northrop Grumman Northrop Grumman Aerospace Systems Northwestern University Ontario Tech University (University of Ontario Institute of Technology) Optical Metrology Centre Oqton Orbital Sciences Corp. Parker Intellectual Property Enterprises, LLC Performance Review Institute Phantom Works, Advanced Lean Enterprise Photometrix Photometrix Pty Ltd PK Engineering, Ngaruawahia Porta Performance PRAGMA NDT PrecisionPath Consortium for Large-Scale Manufacturing Premium AEROTEC Purdue University QinetiQ North America Quality Vision International Radio Frequency Technology Division, National Institute of Standards and Technology RAN Science & Technology, LLC Raytheon Technologies RECON Services RECON Services Inc. RMIT University Robotic Research, LLC Rocket City Metrology Rolls-Royce Corp./Purdue University Rolls-Royce North America Rolls-Royce plc Saab Group Scania CV School of Mechatronic Engineering and Automation, Shanghai University Shanghai University, School of Mechatronic Engineering and Automation Sigma Space Sigma Space Corporation Sivananthan Laboratories Space Telescope Science Institute Spectrum Metrology Ltd. Spirit AeroSystems, Inc. STELIA Aerospace SURVICE Engineering Company SURVICE Metrology System Integration Group, ISRO Satellite Center System Integration Group, ISRO Satellite Centre, Indian Space Research Organisation Tech Innovations, LLC TEI - TUSAŞ Engine Industries Tekniker The Boeing Company The Lab for Integrated Metrology Applications, The University of Bath (United Kingdom) The Mariners' Museum Tianjin University Tianjin University, State Key Laboratory of Precision Measuring Technology and Instruments TOFAS TOFAŞ / Türk Otomobil Fabrikası A.Ş. Triumph Aerospace Structures Triumph Aerostructures - Vought Aircraft Division Turkish Aerospace U.S. Army Ordnance Museum U.S. Army Research Laboratory UCL Autonomous Manufacturing Lab UCL Department of Civil, Environmental and Geomatic Engineering University College London University of Applied Sciences Oldenburg University of Arizona, Steward Observatory and SORAL University of Bath University of Bath (UK) University of California, Davis (IDAV) University of Melbourne, Department of Geomatics University of Michigan Transportation Research Institute University of Michigan, Manufacturing Validation Solutions University of North Carolina at Charlotte University of Nottingham University of Ontario Institute of Technology University of Ontario Institute of Technology, Faculty of Engineering and Applied Science University of Warwick, United Kingdom University of Zaragoza (Spain) Variation Reduction Solutions Inc. Vera C. Rubin Observatory VisionTech, Inc. VMT GmbH Voith Hydro Volume Graphics GmbH (part of Hexagon) Wagstaff, Inc. Wenzel America Ltd. Werth Inc. Wichita State University, National Institute for Aviation Research, CAD/CAM Laboratory Yokohama National University ZEISS Industrial Quality Solutions

Author All authors A. England A. Metherell A. Naga A. Ola Aaron Hudlemeyer Adam Warden Ahmad Barari Ahmet Akgul Akihiro Oyama Alan L. Kastengren Alan Metzel Alberto F. Griffa Alberto Mendikute Aleksandr Bakhtin Alexander Hiller Alexander Richter Alexander Schoenberg Alexander Schönberg Alexander Zholents Alexandra E. Curtin Alistair B. Forbes Altaf A. Khan Amir Fallahi Amirali Lalehpour Andreas Poesch Andrew J. Francis Andrew Lewis Andrew Ramsey Aniket Tekawade Anilma Freire Animesh Jain Anthony Barker Anthony R. Slotwinski Anthony Slotwinski Armağan Altınışık Arnauld Dumont Art Kietlinski B. Borchardt B. Frey B. Griffith B. Hoffmann Eegholm B. Muralikrishnan B. Saif Babak Saif Babatunde O'Sheg Oshinowo Bala Muralikrishnan Ben Hughes Ben Rennison Ben Sargeant Ben Thomason Benjamin Carrier Bente Eegholm Bente H. Eegholm Bill Griffin Bill Mongon Bill Tandler Bo Sun Bob Bridges Bob Salerno Bob Stillwell Bobby Marsh Brad Frey Brad Medlin Brad Wilson Braden Czapla Brandon A. Sforzo Brett Bordyn Brian Brown Brian Campbell Brian Miller Brian Nielsen Brian Page Brian S. Pippenger Brian Wallin Brian Winters Brock LaHart Bruce Borchardt Bryan A. Bond Bryan Bramwell Brynmor Davis C. Blackburn C. Koteshwar Rao Çağdaş Şen Carl Singelais Carson Miller Chan-Hong Park Chang Jin Oh Charles L. Doose Charles Mitchell Charles Mony Charles Richards Charles Wilson Charlie Boatwright Charlie Ellison Charlie Rohling Chenghao Yu Chris Barrow Christiaan Gribble Christian Drouet d'Aubigny Christiane Bathow Christine Darve Christoph Naab Christoph Ohrt Christopher A. Greer Christopher Affer Christopher Blackburn Christopher F. Powell Christopher Jamieson Chuck Pfeffer Clive Fraser CMS Certification Committee Cody Anderson Cody Berry Colleen Brady Cunniffe Constantin Lazar Corinne Tokerud Craig Allen Cramer Craig Farniok Craig McKelvey Craig Shakarji Cristopher D. Hernikl Curtis Tingle D. A. Canepa Talamas D. Sawyer D.S. Sawyer Dabao Lao Dan Nelson Daniel Brown Daniel Campbell Daniel Pyzak Daniel S. Sawyer Dany Lessard Darin Ingimarson Dave Cantoni Dave Dozor David A. Kubalak David B. Ober David Caprio David E. Humphries David H. Parker David J. Bromberek David K. Powers David Krop David Kubalak David L. Linville David MacKinnon David Orozco David Persons David R. Novotny David R. Weir David Rearick David Reich David Ross-Pinnock David Svesko David Wick Davide Bianculli Dean Osgood Deger Akin Dengfeng Dong Dennis Everett Dennis J. Warren Devin Grande Dieter Loh Dinghao Feng Dominic Albanese Don Burnard Donald Blackmon Donald Jasurda Donald Whaley Donn Liddle Donna Kubik Donnie Brown Doug Kappler Doug Odlaug Dusan Banjanac Dusan Spernjak Dylan Bender E. Kushnir E. Reithmeier Ed Ingham Edgar Black Edmund Serwinski Eduard Reithmeier Edward A. Devine Edward Morse Edward Sergoyan Edward West Elizabeth King Emil M. Traktenberg Emil Trakhtenberg Emily Elizabeth Emre Bolova Eric Hansen Eric Mentzell Eric Rosenberg Eric Schindelholz Eric W. Edwards Erik Klaas Erik Trostmann Eugene Gleason Ezgi Uğur Solakoğlu Fanchang Meng Farid Javidpour Farzaneh Kaji Fernando Egana Francesco Savelli Francis Karl François Mainguy Frank Chen Franz Helmli Fred Jallon Gabor Lukacs Garrett Kelley Gary Dreessen Gary Vasiloff Geoffrey L. Gatton George Gayton Geraint W. Jones Gerald H. Cheshier Geraldine Cheok Gerd Schwaderer Ghassan Chamsine Ghassan M. Chamsine Gianluca Giordano Giles Gaskell Giuseppe Ganci Glen Mullineux Glen P. Cork Glenn Richard Rees Gorka Kortaberria Gottfried Frankowski Graham Anderson Greg Mann Greg Robinson Greg Wenzel Gregorio Balandran Gregory A. Scharfstein Gregory George Gregory Scharfstein Guillem Megias Homar Guillermo Nevado Güray Akbulut Hannah Cocoran Hannah Corcoran Hannah Corran Harald Suphellen Harry Hanley Harshana G. Dantanarayana Hau-Wei Lee Herminso Villarraga-Gómez Herve Savaton High Horst A. Beyer Horst Friedsam Hossein Gohari Hua-Chung Liou Igor Lengyel Ilan Thomason Ingobert Schmadel Israel Schechter Ivan S. Trujillo J. Eric Mentzell J. Gill J. Hayden J.-Angelo Beraldin Jacob Brooks Jacob M. Hubert James Bennett James Cobb James Craig West James E. Rix James F. F. Clark James Gill James H. Burge James MacMillan James Mansell Jan Boehm Jana Barker Jarno Salmela Jaromir M. Penicka Jason Coder Javier Del Hoyo Jean-Baptiste Monnerie Jean-Christophe Bry Jean-Francois Normand Jeff Guerrieri Jeffrey Guerrieri Jeffrey Hammond Jennifer Monreal Jeremy Comment Jeremy Marvel Jeremy Nudell Jessica Walker Jiarui Lin Jigui Zhu Jim Lind JoanClaire Corbett Jochen Schlobohm Jody E. Muelaner Joe McMann Joe Michaud Joe Sabol Joel D. Fuerst Joel Hough Joel Martin Joerg Seewig Johan Gout John A. Greenwood John Bernardin John Brown John Chan John Costello John Greenwood John Gross John Horwell John K. Villanueva John Kyle John Lockhart John Morgan John R. Troll John Rohrer John Scheibel John Stoup John Thornby John Troll John W. Dorsey-Palmateer Jon M. Baldwin Jonathan M. Huntley Jonathan McLaughlin Jorian Khan Jose A. Yague-Fabra Jose Corona Jr. Joseph Calkins Joseph DeFazio Joseph E. Hayden Joseph Packer Joshua A. Gordon Joshua Berrier Joshua D. Montano Joshua S. Downey Juergen Dold Juergen Peipe Juergen Pfeifer Julio Sanchez Justin Novak Jyani Vaddi K. Redman K. V. Govinda Kamel Saidi Kamleshkumar Suthar Karl Christensen Keith B. Knight Keith Bevan Keith Churchill Ken R. Vakil Ken Steffey Ken Vakil Kenneth Edmundson Kenneth I. Joy Kenneth J. Steffey Kerstin Zangl Kevin Rau Kevin Redman Kim Summerhays Klaus-Peter Erben Krishnakumar Gopal Kunal Gokhale Kurt A. Goetze Kwanghan Lee Kyle Ferguson Kyle S. Johnston Lanny Wilson Lansun Stephanie Chang Lars Mattsson Lars Virgin Lauren Wells Leslie Baker Liam Bradley Lindsay MacDonald Linghui Yang Lionel Khelif Lisa Leonard Luc Cournoyer Lucas M. Valdez Luis M. Garcia-Guzman Lukasz Turolski Lynn Baker M. Casas M. Dominguez M. Hansen M. Kaestner M. Mainwaring M. R. Thyagaraj Magnus Lundgren Manal Khreishi Manfred Juretzko Manfred Messing Marc Soucy Marcie Renner Marcos Sales Guerra Tsuzuki Marek Franaszek Margaret Dominguez Maria Hennes Maria Nowak Marie Craven Mario O. Valdez Mark A. Butkiewicz Mark D. Haynes Mark Denman Mark Meuret Mark Shortis Mark Wright Markandeya Vaggu Markus Kaestner Martin Amyot Mary Liang Masashi Sato Mat Cappel Mateusz Turolski Mathieu Dube-Dallaire Matt Cornelius Matt Emig Matt Maakestad Matt McKee Matt Warden Matthew Andrew Matthew Chen Matthew Ilardo Matthew J. Novak Matthew Novak Matthew T. Kasa Matthew Winger Mattia Lazzerini Mauricio Hess-Flores Meghan Shilling Mehran Satari Mel Wachowiak Meny Benady Michael A. Lazar Michael Allman Michael B. McCarthy Michael Brenner Michael Campbell Michael Francis Michael Hein Michael J. Hardin Michael Kleinkes Michael Kreil Michael O'Brien Michael Raphael Michael Richey Michael Steinzig Michael W. McElwain Michael Ward Michelle Edwards Mickael Keller Mike Borden Mike Casas Mike Facello Mike Wehn Mikhail A. Kubantsev Mikhail M. Shashkov Miles Molnar Mili Shah Ming Ke Mingu Kang Mitch Marchi Mohammad T. Kavosh Mojtaba A. Khanesar Monica Kirby Moritz Krauss Mozhdeh Shahbazi Muralidharan V. Myles Puentes Nabil Romman Nanda Kumar J Naomi Kotwal Nathan Maresch Nathan McAllister Nathan McRae Nathanael Bernard Nay Lin Niah Thomason Nick Kay Nick Spartana Nick Turicek Niclas Josefsson Nicolas Cornille Nod Clarke-Hackston Norman Gross Oliver Martin Omar Abo-Namous Onat Ekinci P. Morken Pablo Puerto Pam M. Davila Pamela Davila Pat Picariello Patricia Castellon Patrick C. Hammett Patrick Hebert Patrick Keogh Patrick McGrew Patrick T. Walsh Paul G. Maropoulos Paul Huang Paul Jeffers Paul Richardson Paul Smith Paul T. Nicholas Paul Zhuo Per Saunders Pete Balestracci Pete Morken Peter Lindahl Peter N. Ostroumov Philip Cunliffe Philip Freeman Philip Hewitt Pieter Krige Po-Er Hsu Pravesh Mathur Predrag Sekulic Prem Rachakonda R. Gillhaus R. Gorman R. Ohl Raimund Loser Rainer Lott Rajeev R. B. Rajeev R. Badagandi Randal C. Telfer Randal Telfer Randy Fratena Randy Swanson Ray Admire Ray Elledge Ray Karadayi Ray Ryan Raymond G. Ohl IV Raymond Ohl Rebekah Smith Redland Sanders Rehab Khattab Reinhard Danzl Ric Baldini Rich Dittman Rich Eckenrode Rich Guerin Richard A. Uhal Richard Leach Richard Lindqvist Richard Nelson Richard Noll Rilyn Fox Ritter Rob Baltrusch Robb McIvor Robert Bernstein Robert Bridges Robert Flynn Robert Ortman Robert P. Elliott, Jr. Robert Schlader Robert W. Murray Robert W. Strauten Rodrigo Gonzalez Roger Bostelman Rogerio Yugo Takimoto Rohit Jain Rohit Khanna Roianthony Navarro Rolando C. Gwekoh Ron Marsden Ron Schulze Rong Su Rongyi Ji Rudiger Gillhaus Rui Han Russell M. Kurtz Russell Morrison Ryder Nesbitt Ryota Nozaki S. Bradley Cenko S. Ramjee S.D. Phillips Sabyasachi Basu Sam Easley Sam Gosiewski Samanta Piano Samuel P. Jarvis Sandeep Kumar Sandrine Thomas Sang-Hoon Kim Santiago Droll Schuyler Q. Horky Scott Imbery Scott Izzo Scott N. Wesling Scott S. Porta Scott Sandwith Scott Waltari Sebastian Schwanzar Sebastian Zinck Seiichiro Kagei Semyon Sorsher Severine Tournois Shan-Peng Pan Shaofei Zhu Shawn Haar Shawn Recker Shendong Shi Shibin Yin Simon Cronk Simon Gough-Rundle Sina Hale Soner Ören Spencer Thompson Sreelal Sreedhar Stefan Hedman Stefan Obenauer Steffen Matthias Stephen 'Dusty' Rhodes Stephen Kyle Steve Albrecht Steve Ihlenfeldt Steven D. Hand Steven D. Phillips Steven Legowik Steven S. Borenstein Steven S. Seiler Steven Seiler (NAVSEA) Steven W. Geddes Stuart Robson Suchibrata Sen Suneel Kumar Sung-Ho Moon Susan Miller Susan Tardif Sushil Sharma T. A. Clarke T. DeSear T. L. Danabalan T. Scirpo Talion Edwards Tam Vo Taras Vynnyk Thad Ayers Thaddeus Marrara Thanh Thao (Diana) Nguyen Theodore Hadjimichael Theodore J. Hadjimichael Thirumalai Govindan Thomas Allen Thomas Dunker Thomas Gendera Thomas Legleu Thomas Luhmann Thomas M. Hedges Thomas Nickel Thomas Schadegg Thomas Vaughan Tim Bruner Tim Kneier Timo Kahlmann Timothy A. Lippy Timothy Hahn Timothy Nielsen Tom Clary Tom Groff Tom Haritos Tom Hess Tom Melson Tomas Vangell Tony Aquino Tony Calduch Tony Scirpo Tony Slotwinski Toshiyuki Gotoh Travis Balthazor Trevor Toman Troy Michaels Tsai Hong Unai Mutilba V. Roberts Veniamin Stryzheus Vicki Roberts Victor Kane Victoria Knox Vijay M. Pawar Vijaya Lakshmi MR Vincent Lee W. Clark W. Tyler Estler W.T. Estler Wang Gang Wang Shu Qing Wei Ren Weihu Zhou Weiqing Chu Wenjuan Sun Werner Bosemann Weston Vermillion Wiktor Harmatys William B. Louder William Eichhorn William F. Atwater William G. Jansma William J. Gressler William J. Mongon William L. Eichhorn William Louder William Wadsworth William Watt Wilvin Crawford X. Wang Xi Zhang Xiaoping Qian Xiaoyin Zhu Xu Zhang Yanbiao Sun Yin Guo Yishai Galatzer Yongjie Ren Yongwoo Park Yuanqun Liu Yury Ivanyushenkov Zachary A. Conway Zachary Sanchez-Archuleta Zheng Wang Zili Zhang

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Showing 41–60 of 116 results

1. CMSJ-08-1-05 Journal · Volume 8, Number 1 (Spring 2013) Members

   Multi-Scale Inspection of Worn Surfaces for Product Regeneration

   Moritz Krauss, Markus Kaestner, Eduard Reithmeier

   Institute of Measurement and Automatic Control, Leibniz Universität Hannover

2. CMSJ-07-2-01 Journal · Volume 7, Number 2 (Autumn 2012) Members

   Developing a Control Network Crossing a Thermal Boundary: A Wing Jig Case Study

   Karl Christensen, Robert Flynn

   Electroimpact, Inc.

3. CMSJ-07-2-03 Journal · Volume 7, Number 2 (Autumn 2012) Members

   Using MBE Data in Quality Planning Processes

   Paul Huang, Rich Eckenrode

   RECON Services Inc. · U.S. Army Research Laboratory

4. CMSJ-07-1-05 Journal · Volume 7, Number 1 (Spring 2012) Members

   An Improvised Two-Dimensional Laser Surface Scanner for Diagnosis of RF Thermionic Electron Gun

   William G. Jansma

   Argonne National Laboratory

5. CMSJ-06-1-03 Journal · Volume 6, Number 1 (Spring 2011) Members

   System Improvements Based on the Operating Experiences of an Automatic 3D Measurement System

   Masashi Sato, Ghassan M. Chamsine

   Hitachi Engineering & Services Co., Ltd. · Nikon Metrology, Inc.