Thomas Hedges

Nikon Metrology

Speaker Bio:

Mr. Thomas Hedges currently serves as the Vice President of Engineering for Large Volume Metrology for Nikon Metrology, Inc.  In that role he is directly responsible for the engineering team that is doing research and development on Large Volume Metrology with emphasis on the Laser Radar.  Mr. Hedges joined Nikon in 1997 through various acquisitions.  Mr. Hedges is currently based out of Manassas Virginia office and has been coming to CMSC since 1999.

Abstract:

Bringing new Metrology Techniques to the Factory

Thomas M. Hedges, Nikon Metrology, Inc., VP Engineering, Laser Radar

Ghassan Chamsine, Nikon Metrology, Inc.  Software Development Manager, Laser Radar

9453 Innovation Drive

Manassas, VA  20110

+1.703.407.0582

Thomas.Hedges@Nikon.Com

(b) R&D (Research and Development) and/or New Technology

 

It is a difficult task to switch measurement technologies.  Every technology will offer capabilities that are of interest to the user and on paper might be the perfect technology for the application.  However, before changing technologies a project must be executed to determine the differences between the technologies in the specific application.  This presentation looks at some of the real world issues with comparing two technologies with completely different measurement techniques: contact measurements and non-contact measurements.  The examples will be comparing CMM measurements to Laser Radar measurements and will discuss accuracy, repeatability, and reproducibility.  Topics discussed include: 1. how accuracy is compared (ISO10360 and independent artifacts), 2. What are the factors that lead to differences in measurements (temperature, part holding jigs, alignments), and 3. How to minimize the differences to assure that the new process is equivalent (measurement techniques).  Although specific examples will be discussed the results can help provide guidance applicable to any measurement technology change: